To design extremely high q value saw resonator with metal reflector, couplingofmodes method should be used to locate the two transducers in the appropriate position accurately. Nguyen, chair high qnarrowband lters at ultra high frequencies hold promise for reducing noise and. In this work, we designed a oneport saw resonator, which consists. Later application data is oscillation circuit by 1port saw resonator. Saw unidirectional idt filters saw resonator filters duplexers oscillators saw wireless tags and sensors contents saw transversal filter saw unidirectional idt filters. Highq lowimpedance mems resonators by liwen hung a dissertation submitted in partial satisfaction of the requirements for the degree of doctor of philosophy in engineeringelectrical engineering and computer sciences. Sa o part numbering the structure of the global part numbers that have been adopted since. In addition to applications of ultra high q uhq devices we are finding new ways to boost q factor to even higher levels. Abstructthe design of highq lowdistortion surface acoustic wave. To date, it has been challenging to achieve a high quality q factor and small phonon mode size for saw resonators at gigahertz frequencies. Applications of wireless temperature measurement using saw. Nguyen, chair the ever increasing need for regional and global roaming together with continuous advances.
Theoretical and experimental analysis of high q saw resonator transient response in a wireless sensor interrogation application p. Ultrahigh q planar silicon microdisk resonators for chip. The basic circuit configuration of the eg9000gc consists of a saw resonator, high frequency amplifier, power divider, and frequency tuning circuit. Different approaches are possible for a saw resonator sawr stabilised oscillator. The characterization of surface acoustic wave devices.
In addition to the properties above the saw resonator can be design to have high q qs 20,000100,000, which allows for accurate determination of the frequency and frequency shifts. The band structure of the saw is relatively insensitive to the etch width see fig. Simulated dependence of q on etch depth of a 1 ghz saw resonator with tapered pnc re. We examine the role of the substrate in the performance of such microdisk resonators. High q 0 resonators and wideband delay lines can measure the sensed parameters with high accuracy 0. The oscillator is switched on and off in step with the data telegram. High quality factor surface fabryperot cavity of acoustic waves. High quality factor surface fabryperot cavity of acoustic waves yuntao xu, wei fu, changling zou, zhen shen, and hong x. Cg01h 541 ceramic resonators introduction to ceramic resonators ceramic resonator crystal. We report the fabrication and experimental characterization of an ultrahigh q microdisk resonator in a silicononinsulator soi platform. A novel instrument based upon extremely high qvalue surface. A low q resonator of similar design is also shown with an unloaded q of approximately 7,500. The fbar resonator has a quality factor of about 400 and the piezoelectric coupling coefficient of 4.
Tobar 1 school of physics, university of western australia, 35 stirling hwy, crawley, wa, 6009 dominique cros xlim umr cnrs n6172 faculte des sciences et techniques 123, avenue a. Among various microelectromechanical resonator technologies, aluminum nitride aln lamb wave resonators lwrs have attracted great attention since it combines the advantages of. Highq aln contour mode resonators with unattached, voltage. Nguyen, chair highqnarrowband lters at ultrahigh frequencies hold promise for reducing noise and. April 2, 2019 introduction to surface acoustic wave saw. A surface acoustic wave saw is an acoustic wave traveling along the surface of a material exhibiting elasticity, with an amplitude that typically decays exponentially with depth into the material. It is defined as the ratio of the peak energy stored in the resonator in a cycle of oscillation to the energy lost per radian of the cycle. A lowq resonator of similar design is also shown with an unloaded q of approximately 7,500. Applications of wireless temperature measurement using. Knuuttila, tapani makkonen, member, ieee, victor p. Extremely lowphasenoise saw resonators and oscillators.
Application note sawcomponents comparison between negative impedance oscillator colpitz oscillator and feedback. Much research has been done in the last 20 years in the area of surface acoustic wave sensors. This paper describes fbar and saw resonators which have high q factor using unique technology, and their applications. This paper describes fbar and saw resonators which have highq factor using unique technology, and their applications. In physics and engineering the quality factor or q factor is a dimensionless parameter that describes how underdamped an oscillator or resonator is. Saw cr filters at frequencies as high as 1500 mhz were demonstrated in the mid 1980s.
Lowloss materials for high qfactor bragg reflector. Fbar resonators with sufficient high q for rf filter. Pdf alelectrodes on 3648yxlitao3 substrates have been widely used in surface acoustic wave saw filters and saw duplexers. The saw resonator metal reflector with loaded qvalue up to 15 000 the unloaded qvalue up to 18 000, center frequency at 150 mhz was. Surface acoustic wave saw resonators that confine surface phonons can play a crucial role in such integrated phononic systems due to small mode size, low. Ghzband, highaccuracy saw resonators and saw oscillators. Typically, this is a timeconsuming process, involving the construction of custom coupling networks to connect the resonator to a network analyzer. In this paper, we describe a new type of magnetic surface acoustic wave saw sensor that consists of interdigital transducers made of a magnetostrictive material, ni, on a quartz substrate. Phononic band structure engineering for highq gigahertz.
Phononic band structure engineering for high q gigahertz. Surface acoustic wave saw resonators are critical components in wireless. Acoustic loss mechanisms in leaky saw resonators on lithium. Oscillation circuit is mostly like a rf amplifier with feedback loop. Pdf high q saw resonator using upperelectrodes on grooved. Resonators high frequency saw resonator application 1 remote keyless entry receiver rx if local osc. Therefore, resonators with both high kt 2 and high q are desired for large bw, steep roll off bandpass. Highqaln contour mode resonators with unattached, voltageactuated electrodes by robert anthony schneider doctor of philosophy in engineeringelectrical engineering and computer sciences university of california, berkeley professor clark t. Qvalue is the most important factor for saw sensors based upon saw resonator. Theoretical and experimental analysis of high q saw resonator. Utilizing a thin chemically etched leadframe, a fourpoint mount with built in stress relief has been designed to mount in the plane of the. Highfrequency oneport colpitts saw oscillator for chemical sensing. The achievable bandwidth of such filter is ultimately limited by the electromechanical coupling factor kt 2 of the resonators, while the rolloff is determined by resonator quality factor q.
This sensor can be used as an element of a resonatortype wireless saw sensor system because it has a high q. Rathore 1 1 care, indian institute of technology delhi, new delhi, india 2 femtost, umr cnrs 6174, univ. Resonator measurements with noncontact probes introduction the measurement of resonator center frequency and q factor is an essential part of the design of rf and microwave filters and oscillators. Fbars film bulk acoustic resonators have proven themselves as a valid solution to replace conventional rf filters, demonstrating relatively high q.
Tang department of electrical engineering, yale university, new haven, ct 06511, usa. Surface acoustic wave filters and resonators use in a wide range of applications such as keyless entry devices, rf modems and telemetry systems, alarm systems and mobile phones. These other oscillation modes exist because the ceramic resonator uses mechanical resonance. Acoustic loss mechanisms in leaky saw resonators on lithium tantalate julius koskela, jouni v. Idtinduced saw in between dual reflectors provides a resonator that achieves a high q. Lowloss materials for high q factor bragg reflector resonators jeanmichel le floch, michael e. Due to good selectivity and steep transition band offered for cellular applications, modeling and development of high q thinfilm baw devices is a topic of research gaining attention 2. Acoustic radiation from ends of idt in synchronous lsaw. From a practical point of view saw filters have considerable drawbacks beyond 2 ghz whereas baw devices up to 16 ghz have been demonstrated 1. The diminished pulse width is seen to reduce the received power by 3 db. The topic facet will reveal the highlevel topics associated with the articles returned in the search results.
Resonator technology metallic cavity resonators have historically been the choice for. Surface acoustic wave resonators wiley online library. The basic circuit configuration of the eg9000gc consists of a saw resonator, highfrequency amplifier, power divider, and frequency tuning circuit. Rathore 1 1 care, indian institute of technology delhi, new delhi, india. Tapered phononic crystal saw resonator in gan siping wang, laura c. Gardner microsensors and bioelectronics laboratory university of warwick coventry, uk j. In addition a wide variety of materials are available with a range of pertinent properties as is shown in table 2. In this secton background is provided on the evolution of uhq resonator research in our group. A stack of al bottom electrode, aln layer and top al electrode is used to excite the thickness extensional te vibration mode. Transistor shall be a high frequency type ft a few ghz or.
Conventional litao 3 resonator a synchronous resonator with n t 121 electrodes in the idt and n. Highq resonators using fbarsaw technology and their. Similar to the one port saw resonator, the two port saw resonator employs the same mechanism to achieve a high q. Acoustic loss mechanisms in leaky saw resonators on. Q for a 1 port resonator is as defined in your original post. Rathore care, indian institute of technology delhi new delhi, india email. Include rf saw low loss filters for remote control receivers and mobile telephone and receive path. These values of q are readily achievable with saw resonators. Saw resonators in the ghz frequency range have been found to have low losses already at 4.
Theoretical and experimental analysis of high q saw. The saw resonators design, fabrication and electrical characteristics are described in section 11, including a detailed discussion of a new highincident rf power burnin technique that has been used to consistently reduce a saw resonators flicker noise level. Acoustic loss mechanisms in leaky saw resonators on lithium tantalate. The transmitter is a sawstabilized oscillator with a pcb antenna, where a oneport saw resonator is designed in, using the basic circuit shown in fig. Salomaa, member, ieee abstract we discuss acoustic losses in synchronous leaky surface acoustic wave lsaw resonators on rotated ycut lithium tantalate litao 3. Two port saw resonators are comprised of two idts inputoutput mounted in the center with reflectors arranged on both sides. Q value is the most important factor for saw sensors based upon saw resonator. Saw resonators permit to achieve higher frequencies than their bulk wave acoustic counterparts with comparable spectral purity and very high q, while, due to. High q gigahertz surface acoustic wave cavity on lithium niobate. Because of the potential for high qvalue, low noise level and higher stability, we. Saw filters are now used in mobile telephones, and provide significant advantages in performance, cost, and size over other filter technologies such as quartz crystals based on bulk waves, lc filters, and waveguide filters. Saw resonators are comprised of two idts inputoutput. Therefore, to create the saw resonator, we vary the. Higher harmonics for other modes of oscillation exist other than the desired oscillation mode.
Highq lowimpedance mems resonators by liwen hung doctor of philosophy in engineering electrical engineering and computer sciences university of california, berkeley professor clark t. Values in the range of mid parts in 1011 to low parts in 1010 per g have been achieved with a simple planar support structure. Surface acoustic wave resonators on quartz ieee uffc. Highfrequency oneport colpitts saw oscillator for chemical sensing s. Optimization of baw resonator for wireless applications. Monolithic ultrahighq lithium niobate microring resonator mian zhang, cheng wang, rebecca cheng, amirhassan shamsansari, and marko loncar. The device performances in terms of quality factor qfactor and electromechanical. A surface acoustic wave saw substrate for a duplexer such as personal. In addition to applications of ultrahighq uhq devices we are finding new ways to boost q factor to even higher levels. Saw resonator can be classified kinds of freq we can customize for you in different applications. Ghzband, highaccuracy saw resonators and saw oscillators apr. Highperformance aluminum nitride lamb wave resonators for.
Capabilities and applications of saw coupledresonator filters. While substrate leakage loss has warranted the necessity of substrate undercut structures in the past, we show here that the substrate has a very useful role to play for. Ghzband, high accuracy saw resonators and saw oscillators apr. We report the fabrication and experimental characterization of an ultra high q microdisk resonator in a silicononinsulator soi platform. Thus, a highperformance mems resonator technology is highly in demand as the fundamental components in the rf frontend for an advanced wireless communication system. High q lowimpedance mems resonators by liwen hung a dissertation submitted in partial satisfaction of the requirements for the degree of doctor of philosophy in engineeringelectrical engineering and computer sciences. Pdf phonons at gigahertz frequencies interact with electrons, photons. Highfrequency oneport colpitts saw oscillator for chemical. A new electrode material suitable for alnbased fbars have been developed in. The transient time is the time step of the high level period. Pdf highq gigahertz surface acoustic wave cavity on lithium. To design extremely high qvalue saw resonator with metal reflector, couplingofmodes method should be used to locate the two transducers in the appropriate position accurately. Saw resonator filters duplexers oscillators saw wireless tags and sensors.
The surface acoustic wave saw resonator 2, 8 configuration to be discussed is shown. April 2, 2019 introduction to surface acoustic wave saw devices. High qaln contour mode resonators with unattached, voltageactuated electrodes by robert anthony schneider doctor of philosophy in engineeringelectrical engineering and computer sciences university of california, berkeley professor clark t. The q factor calculation for the twoport saw resonator. Osa monolithic ultrahighq lithium niobate microring resonator. A novel instrument based upon extremely high qvalue. Temperaturecompensated and highq piezoelectric aluminum. Saw filters china manufacturer for sale, high quality saw. Typical phase noise performance of metallic cavity oscillators can be as low as 180 dbchz at 10 khz offset for a 10 ghz carrier 5. This sensor can be used as an element of a resonator type wireless saw sensor system because it has a high q. Methods for achieving highfrequency outputsaw oscillators.
Abstractwireless sensing using saw resonators calls for an accurate modeling and. But q for a 2 port is a somewhat undefined concept. That is, micromechanical vibrating resonators with high quality factor q and good frequencytemperature stability at high series resonance frequency fs are the required fundamental components for a highperformance wireless communication system. A builtin saw resonator attenuates most of this noise spectrum, only a very narrow frequency band can pass.
Recently, lamb wave mode propagating in piezoelectric thin plates has attracted great attention. Surface acoustic wave resonators quantum device lab. High frequency design high z in and low z out for minimum interference r l r s for maximum. In combination with relatively high piezocoupling and low tcf, ihp saw devices have been designed with excellent characteristics. Transmission spectrum in logarithmic scale indicating that the resonator is nearly critically coupled. Saw resonators consist of an interdigitated transducer idt placed in a fabryperot like cavity formed by shorted electrode gratings on both side, as shown in fig 1. Magnetic sensor based on surface acoustic wave resonators. High quality factor surface fabryperot cavity of acoustic. High q saw resonator using upperelectrodes on groovedelectrodes in litao3. If you want to treat the 2 port saw bandpass response as the resonator in a transmission type oscillator, then yes, measuring the 3 db down points will relate to a. The reflectors, consisting of arrays of shallow etched grooves, are spaced to form a resonant cavity in which one or two recessed aluminum transducers are located.
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